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  4. Low voltage vertical flaps arrays as optical modulating elements for reflective display and switchable gratings
 
conference paper

Low voltage vertical flaps arrays as optical modulating elements for reflective display and switchable gratings

Jutzi, F.  
•
Noell, W.  
•
de Rooij, N. F.  
2012
Moems And Miniaturized Systems Xi
Conference on MOEMS and Miniaturized Systems XI

A novel technology is presented for arrays of vertical flaps as optically modulating elements which are actuated electrostatically to horizontal position at low voltages of 30-50V. One application is a reflective display exhibiting a contrast ratio of 1:95. We will also show a) shutters for transmissive devices in an array configuration and b) switchable gratings. A large variety of flap geometries are fabricated such as flat reflective, grating, lens or grid shape. Poly-Si refill of thin high aspect-ratio trenches followed of dry etching of the surrounding material is used to fabricate the flaps suspended by torsion beams.

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Type
conference paper
DOI
10.1117/12.906631
Web of Science ID

WOS:000302688500015

Author(s)
Jutzi, F.  
Noell, W.  
de Rooij, N. F.  
Date Issued

2012

Publisher

Spie-Int Soc Optical Engineering, Po Box 10, Bellingham, Wa 98227-0010 Usa

Published in
Moems And Miniaturized Systems Xi
ISBN of the book

978-0-8194-8895-4

Series title/Series vol.

Proceedings of SPIE; 8252

Start page

82520J

Subjects

optical modulator

•

reflective display

•

micromirror

•

large tilt angle

•

low actuation voltage

•

switchable grating

•

shutter array

•

Ink

Editorial or Peer reviewed

NON-REVIEWED

Written at

EPFL

EPFL units
SAMLAB  
Event nameEvent placeEvent date
Conference on MOEMS and Miniaturized Systems XI

San Francisco, CA

Jan 24-25, 2012

Available on Infoscience
May 11, 2012
Use this identifier to reference this record
https://infoscience.epfl.ch/handle/20.500.14299/80265
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