Low voltage vertical flaps arrays as optical modulating elements for reflective display and switchable gratings

A novel technology is presented for arrays of vertical flaps as optically modulating elements which are actuated electrostatically to horizontal position at low voltages of 30-50V. One application is a reflective display exhibiting a contrast ratio of 1:95. We will also show a) shutters for transmissive devices in an array configuration and b) switchable gratings. A large variety of flap geometries are fabricated such as flat reflective, grating, lens or grid shape. Poly-Si refill of thin high aspect-ratio trenches followed of dry etching of the surrounding material is used to fabricate the flaps suspended by torsion beams.


Published in:
Moems And Miniaturized Systems Xi, 8252, -
Presented at:
Conference on MOEMS and Miniaturized Systems XI, San Francisco, CA, Jan 24-25, 2012
Year:
2012
Publisher:
Spie-Int Soc Optical Engineering, Po Box 10, Bellingham, Wa 98227-0010 Usa
ISBN:
978-0-8194-8895-4
Keywords:
Laboratories:




 Record created 2012-05-11, last modified 2018-03-17


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