Large MEMS-based programmable reflective slit mask for multi-object spectroscopy fabricated using multiple wafer-level bonding
Canonica, Michael; Zamkotsian, Frederic; Lanzoni, Patrick; Noell, Wilfried; de Rooij, Nico
2012

Abstract

Multi-object spectroscopy (MOS) allows measuring infrared spectra of faint astronomical objects that provides information on the evolution of the Universe. MOS requires a slit mask for object selection at the focal plane of the telescope. We are developing MEMS-based programmable reflective slit masks composed of 2048 individually addressable micromirrors. Each micromirror measures 100 x 200 mu m(2) and is electrostatically tilted by a precise angle of at least 20 degrees. The main requirements for these arrays are precise and uniform tilt angle over the whole device, uniformity of the mirror electromechanical behavior, a flat mirror deformation and individual addressing capability of each mirror. This capability of our array is achieved using a line-column algorithm based on an optimized tilt angle/voltage hysteresis of the electrostatic actuator.

Details

Title Large MEMS-based programmable reflective slit mask for multi-object spectroscopy fabricated using multiple wafer-level bonding
Author(s) Canonica, Michael ; Zamkotsian, Frederic ; Lanzoni, Patrick ; Noell, Wilfried ; de Rooij, Nico
Published in Moems And Miniaturized Systems Xi
Series Proceedings of SPIE, 8252
Pages 82520B
Conference Conference on MOEMS and Miniaturized Systems XI, San Francisco, CA, Jan 24-25, 2012
Date 2012
Publisher Spie-Int Soc Optical Engineering, Po Box 10, Bellingham, Wa 98227-0010 Usa
ISBN 978-0-8194-8895-4
Keywords
DOI https://doi.org/10.1117/12.910094
Other identifier(s) View record in Web of Science
Laboratories SAMLAB
Record Appears in Scientific production and competences > STI - School of Engineering > STI Archives > SAMLAB - Sensors, Actuators and Microsystems Laboratory
Conference Papers
Work produced at EPFL
Published
Record creation date 2012-05-11

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