000176911 001__ 176911
000176911 005__ 20180913061241.0
000176911 037__ $$aCONF
000176911 245__ $$a3D sequential integration: a key enabling technology for heterogeneous co-integration of new function with CMOS
000176911 269__ $$a2012
000176911 260__ $$c2012
000176911 336__ $$aConference Papers
000176911 700__ $$aBatude, P.
000176911 700__ $$aErnst, T.
000176911 700__ $$aArcamone, J.
000176911 700__ $$aCoudrain, P.
000176911 700__ $$0245716$$aGaillardon, Pierre-Emmanuel Julien Marc$$g217069
000176911 7112_ $$aIEEE Circuits and Systems Society Forum on Emerging and Selected Topics (CAS-FEST)$$cSeoul, South Korea$$dMay 20, 2012
000176911 773__ $$tProceedings of the IEEE Circuits and Systems Society Forum on Emerging and Selected Topics (CAS-FEST)
000176911 909C0 $$0252283$$pLSI1$$xU11140
000176911 909CO $$ooai:infoscience.tind.io:176911$$pconf$$pSTI$$pIC
000176911 917Z8 $$x112915
000176911 937__ $$aEPFL-CONF-176911
000176911 973__ $$aEPFL$$rNON-REVIEWED$$sACCEPTED
000176911 980__ $$aCONF