3D sequential integration: a key enabling technology for heterogeneous co-integration of new function with CMOS
2012
Details
Title
3D sequential integration: a key enabling technology for heterogeneous co-integration of new function with CMOS
Author(s)
Batude, P. ; Ernst, T. ; Arcamone, J. ; Coudrain, P. ; Gaillardon, Pierre-Emmanuel Julien Marc
Published in
Proceedings of the IEEE Circuits and Systems Society Forum on Emerging and Selected Topics (CAS-FEST)
Conference
IEEE Circuits and Systems Society Forum on Emerging and Selected Topics (CAS-FEST), Seoul, South Korea, May 20, 2012
Date
2012
Laboratories
LSI1
Record Appears in
Scientific production and competences > I&C - School of Computer and Communication Sciences > IINFCOM > LSI1 - Integrated Systems Laboratory 1 (STI/IC)
Conference Papers
Work produced at EPFL
Accepted
Conference Papers
Work produced at EPFL
Accepted
Record creation date
2012-05-07