Details
Title
Stretchable wavy metal interconnects
Author(s)
Jones, J. ; Lacour, S. P. ; Wagner, S. ; Suo, Z.
Published in
Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films
Volume
22
Issue
4
Pages
1723-1725
Date
2004
Publisher
AVS
ISSN
0734-2101
Laboratories
LSBI
Record Appears in
Scientific production and competences > STI - School of Engineering > IEM - Institut d'Electricité et de Microtechnique > LSBI - Foundation Bertarelli Chair in Neuroprosthetic Technology
Peer-reviewed publications
Work outside EPFL
Journal Articles
Published
Peer-reviewed publications
Work outside EPFL
Journal Articles
Published
Record creation date
2012-05-01