Foil-level fabrication of inkjet-printed pyroMEMS balloon actuators
de Koninck, D. A.; Molina Lopez, F.; Briand, D.; de Rooij, N. F.
2012

Abstract

The fabrication, modeling and testing of a pyroMEMS balloon actuators are presented herein. A foil-level fabrication method was developed, integrating nickel-plated, inkjet-printed igniters capable of generating >200 degrees C for similar to 1 s-sufficient for fuel combustion-and a low-temperature (120 degrees C) lamination technique using thick photodefinable epoxy sheets. Two different fuel mixtures and three different chamber volumes were tested. Balloon actuators (5 mm dia.) were successfully inflated, reaching over 5 mm in height. Maximum balloon heights were in good agreement with the semi-analytical model developed (28-35 % over prediction).

Details

Title Foil-level fabrication of inkjet-printed pyroMEMS balloon actuators
Author(s) de Koninck, D. A. ; Molina Lopez, F. ; Briand, D. ; de Rooij, N. F.
Published in 2012 IEEE 25th International Conference on Micro Electro Mechanical Systems (MEMS)
Pagination 4
Series Proceedings IEEE Micro Electro Mechanical Systems
Pages 64-67
Conference 2012 IEEE 25th International Conference on Micro Electro Mechanical Systems (MEMS), Paris, France, January 29-February 02, 2012
Date 2012
Publisher New York, IEEE
ISBN 978-1-4673-0325-5
DOI https://doi.org/10.1109/MEMSYS.2012.6170094
Other identifier(s) View record in Web of Science
Laboratories SAMLAB
Record Appears in Scientific production and competences > STI - School of Engineering > STI Archives > SAMLAB - Sensors, Actuators and Microsystems Laboratory
Conference Papers
Work produced at EPFL
Published
Record creation date 2012-04-02

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