Foil-level fabrication of inkjet-printed pyroMEMS balloon actuators

The fabrication, modeling and testing of a pyroMEMS balloon actuators are presented herein. A foil-level fabrication method was developed, integrating nickel-plated, inkjet-printed igniters capable of generating >200 degrees C for similar to 1 s-sufficient for fuel combustion-and a low-temperature (120 degrees C) lamination technique using thick photodefinable epoxy sheets. Two different fuel mixtures and three different chamber volumes were tested. Balloon actuators (5 mm dia.) were successfully inflated, reaching over 5 mm in height. Maximum balloon heights were in good agreement with the semi-analytical model developed (28-35 % over prediction).


Published in:
2012 IEEE 25th International Conference on Micro Electro Mechanical Systems (MEMS), 64-67
Presented at:
2012 IEEE 25th International Conference on Micro Electro Mechanical Systems (MEMS), Paris, France, January 29-February 02, 2012
Year:
2012
Publisher:
New York, IEEE
ISBN:
978-1-4673-0325-5
Laboratories:




 Record created 2012-04-02, last modified 2018-03-17


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