SEM, TEM, FIB and EDX microanalysis techniques for gate-all-aroound deeply scaled Si nanowire transistors
2010
Details
Title
SEM, TEM, FIB and EDX microanalysis techniques for gate-all-aroound deeply scaled Si nanowire transistors
Author(s)
Najmzadeh, Mohammad
Pagination
4
Date
2010
Keywords
Laboratories
IEL
Record Appears in
Scientific production and competences > STI - School of Engineering > STI Archives > IEL - Institute of Electrical Engineering
Work produced at EPFL
Technical Reports
Published
Work produced at EPFL
Technical Reports
Published
Record creation date
2012-03-05