Silicon nanowires with lateral uniaxial tensile stress profiles for high electron mobility gate-all-around MOSFETs
2009
Details
Title
Silicon nanowires with lateral uniaxial tensile stress profiles for high electron mobility gate-all-around MOSFETs
Author(s)
Najmzadeh, Mohammad ; De Michielis, Luca ; Bouvet, Didier ; Dobrosz, Peter ; Olsen, Sarah ; Ionescu, Mihai Adrian
Published in
The 35th international conference on Micro Nano Engineering
Conference
MNE 2009, Ghent, Belgium, 28 Sep.-1 Oct. 2009
Date
2009
Keywords
Laboratories
NANOLAB
Record Appears in
Scientific production and competences > STI - School of Engineering > IEM - Institut d'Electricité et de Microtechnique > NANOLAB - Nanoelectronic Devices Laboratory
Conference Papers
Work produced at EPFL
Published
Conference Papers
Work produced at EPFL
Published
Record creation date
2012-03-01