Investigation of oxidation-induced strain in a top-down Si nanowire platform
2009
Details
Title
Investigation of oxidation-induced strain in a top-down Si nanowire platform
Author(s)
Najmzadeh, Mohammad ; Bouvet, Didier ; Dobrosz, Peter ; Sarah, Olsen ; Ionescu, Mihai Adrian
Published in
the 16th biennial conference on Insulating Films on Semiconductors
Conference
INFOS 2009 (biennial), Cambridge, the UK, 28 June-1 July 2009
Date
2009
Laboratories
NANOLAB
Record Appears in
Scientific production and competences > STI - School of Engineering > IEM - Institut d'Electricité et de Microtechnique > NANOLAB - Nanoelectronic Devices Laboratory
Conference Papers
Work produced at EPFL
Published
Conference Papers
Work produced at EPFL
Published
Record creation date
2012-03-01