Investigation of oxidation-induced strain in a top-down Si nanowire platform


Published in:
the 16th biennial conference on Insulating Films on Semiconductors
Presented at:
INFOS 2009 (biennial), Cambridge, the UK, 28 June-1 July 2009
Year:
2009
Keywords:
Laboratories:




 Record created 2012-03-01, last modified 2018-09-13


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