Mode tuning of photonic crystal nanocavities by photoinduced non-thermal oxidation

A method to achieve photoinduced tuning of PhC nanocavity modes is discussed and implemented. It is based on light induced oxidation in air atmosphere with very low thermal budget which produces a local reduction of the GaAs membrane effective thickness and a large blueshift of the nanocavity modes. It is also shown that green light is much more efficient in inducing the micro-oxidation with respect to near infrared light. The observed behaviour is attributed to oxide growth promoted by photoenhanced reactivity. (C) 2012 American Institute of Physics. [doi:10.1063/1.3678036]


Published in:
Applied Physics Letters, 100, -
Year:
2012
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 Record created 2012-02-16, last modified 2018-01-28


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