Breaking the diffraction limit for optical nanolithography using plasmon optics
2002
Details
Title
Breaking the diffraction limit for optical nanolithography using plasmon optics
Author(s)
Martin, Olivier J. F. ; Paulus, M.
Published in
Proc. Progress in Electromagnetic Research Symposium
Volume
1
Pages
751
Conference
Progress in Electromagnetic Research Symposium, Cambridge, U.S.A, July 1-5 2002
Date
2002
Keywords
Laboratories
NAM
Record Appears in
Scientific production and competences > STI - School of Engineering > IEM - Institut d'Electricité et de Microtechnique > NAM - Nanophotonics and Metrology Laboratory
Peer-reviewed publications
Conference Papers
Work produced at EPFL
Published
Peer-reviewed publications
Conference Papers
Work produced at EPFL
Published
Record creation date
2012-02-14