Chapter 13 “MEMS Devices” in Fundamentals of Industrial Electronics (The Industrial Electronics Handbook)
2011
Details
Title
Chapter 13 “MEMS Devices” in Fundamentals of Industrial Electronics (The Industrial Electronics Handbook)
Author(s)
Quero, J. M. ; Luque, Antonio ; Castañer, L. ; Rodríguez, A. ; Fernandez-Bolanos Badia, Montserrat ; Faraone, L. ; Dell, .J. M
Published in
The Industrial Electronics Handbook
Date
2011
Publisher
CRC Press Taylor & Francis Group
ISBN
978-1-4398-0280-9
Laboratories
NANOLAB
Record Appears in
Scientific production and competences > STI - School of Engineering > IEM - Institut d'Electricité et de Microtechnique > NANOLAB - Nanoelectronic Devices Laboratory
Work outside EPFL
Book chapters
Published
Work outside EPFL
Book chapters
Published
Record creation date
2012-02-13