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Capacitive pressure microsensor fabricated by bulk micromachining and sacricial layer etching
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Capacitive pressure microsensor fabricated by bulk[...]
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Luque, Antonio
et al
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04153351_Luque_IECON_2006
version 1
04153351_Luque_IECON_2006.pdf
[774.61 KB]
03 Nov 2020, 13:48
Postprint