RF-MEMS switches with AlN dielectric and their applications

This paper reports on the potential of RF-MEMS technology based on aluminum nitride capacitive dielectric and nickelsuspended membranes to provide RF circuit functions in reconfigurable front-end radios. The RF performance of capacitive switches, distributed MEMS transmission lines (DMTLs) phase shifters for beam steering and tunable filters, including center frequency and bandwidth tuning of bandpass and band-stop filters are presented. Detailed characterization based on S-parameter data demonstrates very promising figures of merit of all fabricated demonstrators from 5 to 40 GHz.


Published in:
International Journal of Microwave and Wireless Technologies, 3, 5, 509-520
Year:
2011
Keywords:
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Note: The status of this file is: EPFL only


 Record created 2012-02-13, last modified 2018-03-17

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