000172659 001__ 172659
000172659 005__ 20181203022601.0
000172659 0247_ $$2doi$$a10.1088/0957-4484/21/11/115503
000172659 02470 $$2ISI$$a000274936700018
000172659 037__ $$aARTICLE
000172659 245__ $$aGranular Co-C nano-Hall sensors by focused-beam-induced deposition
000172659 269__ $$a2010
000172659 260__ $$c2010
000172659 336__ $$aJournal Articles
000172659 520__ $$aWe investigated the performance of Hall sensors with different Co-C ratios, deposited directly in nanostructured form, using Co-2(CO)(8) gas molecules, by focused-electron or ion-beam-induced deposition. Due to the enhanced intergrain scattering in these granular wires, the extraordinary Hall effect can be increased by two orders of magnitude with respect to pure Co, up to a magnetic field sensitivity of 1 Omega T-1. We show that the best magnetic field resolution at room temperature is obtained for Co ratios between 60% and 70% and is better than 1 mu T Hz(-1/2). For an active area of the sensor of 200 x 200 nm(2), the room temperature magnetic flux resolution is phi(min) = 2 x 10(phi 0)(-5) in the thermal noise frequency range, i.e. above 100 kHz.
000172659 6531_ $$aElectron-Beam
000172659 6531_ $$aRoom-Temperature
000172659 6531_ $$aIon-Beam
000172659 6531_ $$aProbes
000172659 6531_ $$aTips
000172659 6531_ $$aFilm
000172659 700__ $$aGabureac, Mihai
000172659 700__ $$aBernau, Laurent
000172659 700__ $$aUtke, Ivo
000172659 700__ $$g110635$$aBoero, Giovanni$$0240034
000172659 773__ $$j21$$tNanotechnology$$k11$$q115503
000172659 909C0 $$xU10321$$0252040$$pLMIS1
000172659 909CO $$pSTI$$particle$$ooai:infoscience.tind.io:172659
000172659 917Z8 $$x145781
000172659 917Z8 $$x148230
000172659 937__ $$aEPFL-ARTICLE-172659
000172659 973__ $$rREVIEWED$$sPUBLISHED$$aEPFL
000172659 980__ $$aARTICLE