The fabrication and characterization of coplanar Barium-Strontium Titanate capacitors on Silicon are described. Micromachining was used to reduce parasitic effects stemming from the substrate, thus enhancing the performance of the device.
Title
Integration of Coplanar Barium-Strontium Titanate Tunable Capacitors on Micro-Machined Silicon
Published in
Integrated Ferroelectrics
Volume
115
Pages
110-119
Conference
International Conference on Electroceramics (ICE-2009), Delhi, INDIA, Dec 13-17, 2009
Date
2010
Record creation date
2011-12-16