Integration of Coplanar Barium-Strontium Titanate Tunable Capacitors on Micro-Machined Silicon
2010
Abstract
The fabrication and characterization of coplanar Barium-Strontium Titanate capacitors on Silicon are described. Micromachining was used to reduce parasitic effects stemming from the substrate, thus enhancing the performance of the device.
Details
Title
Integration of Coplanar Barium-Strontium Titanate Tunable Capacitors on Micro-Machined Silicon
Author(s)
Noeth, A. ; Yamada, T. ; Tagantsev, A. K. ; Setter, N.
Published in
Integrated Ferroelectrics
Volume
115
Pages
110-119
Conference
International Conference on Electroceramics (ICE-2009), Delhi, INDIA, Dec 13-17, 2009
Date
2010
Keywords
Other identifier(s)
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Laboratories
LC
Record Appears in
Scientific production and competences > STI - School of Engineering > STI Archives > LC - Ceramics Laboratory
Conference Papers
Work produced at EPFL
Published
Conference Papers
Work produced at EPFL
Published
Record creation date
2011-12-16