High aspect ratio micromirror array with two degrees of freedom for femtosecond pulse shaping

We show the first results of a linear 100-micromirror array capable of modulating the phase and amplitude of the spectral components of femtosecond lasers. Using MEMS-based reflective systems has the advantage of utilizing coatings tailored to the laser wavelength range. The innovative features of our device include a novel rotational, vertical comb-drive actuator and an X-shaped, laterally reinforced spring that prevents lateral snap-in while providing flexibility in the two degrees of freedom of each mirror, namely piston and tilt. The packaging utilizes high-density fine-pitch wire-bonding for on-chip and chip-to-PCB connectivity. For the first deployment, UV-shaped pulses will be produced to coherently control the dynamics of biomolecules.


Published in:
Moems And Miniaturized Systems Ix, 7594, -
Presented at:
Conference on MOEMS and Miniaturized Systems IX, San Francisco, CA, Jan 25-27, 2010
Year:
2010
Publisher:
Spie-Int Soc Optical Engineering, Po Box 10, Bellingham, Wa 98227-0010 Usa
ISBN:
978-0-8194-7990-7
Keywords:
Laboratories:




 Record created 2011-12-16, last modified 2018-03-17


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