Two-Dimensional MEMS Stage Integrated With Microlens Arrays for Laser Beam Steering
2011
Abstract
A novel microelectromechanical stage with one uniaxial set of combs capable of 2-D actuation is presented. A polymer microlens array (MLA) is mounted vertically onto the stage. Driven at resonance, the stage deflects 124 mu m out of plane and 34 mu m in plane. Finally, laser beam steering is demonstrated using two cascaded MLAs.
Details
Title
Two-Dimensional MEMS Stage Integrated With Microlens Arrays for Laser Beam Steering
Author(s)
Gokce, Sertan Kutal ; Holmstrom, Sven ; Hibert, Cyrille ; Olcer, Selim ; Bowman, David ; Urey, Hakan
Published in
Journal Of Microelectromechanical Systems
Volume
20
Pages
15-17
Date
2011
Publisher
Institute of Electrical and Electronics Engineers
ISSN
1057-7157
Keywords
Other identifier(s)
View record in Web of Science
Laboratories
CMI
Record Appears in
Scientific production and competences > STI - School of Engineering > CMI - Center of MicroNanoTechnology
Peer-reviewed publications
Work produced at EPFL
Journal Articles
Published
Peer-reviewed publications
Work produced at EPFL
Journal Articles
Published
Record creation date
2011-12-16