Two-Dimensional MEMS Stage Integrated With Microlens Arrays for Laser Beam Steering
Gokce, Sertan Kutal; Holmstrom, Sven; Hibert, Cyrille; Olcer, Selim; Bowman, David; Urey, Hakan
2011

Abstract

A novel microelectromechanical stage with one uniaxial set of combs capable of 2-D actuation is presented. A polymer microlens array (MLA) is mounted vertically onto the stage. Driven at resonance, the stage deflects 124 mu m out of plane and 34 mu m in plane. Finally, laser beam steering is demonstrated using two cascaded MLAs.

Details

Title Two-Dimensional MEMS Stage Integrated With Microlens Arrays for Laser Beam Steering
Author(s) Gokce, Sertan Kutal ; Holmstrom, Sven ; Hibert, Cyrille ; Olcer, Selim ; Bowman, David ; Urey, Hakan
Published in Journal Of Microelectromechanical Systems
Volume 20
Pages 15-17
Date 2011
Publisher Institute of Electrical and Electronics Engineers
ISSN 1057-7157
Keywords
DOI https://doi.org/10.1109/JMEMS.2010.2090507
Other identifier(s) View record in Web of Science
Laboratories CMI
Record Appears in Scientific production and competences > STI - School of Engineering > CMI - Center of MicroNanoTechnology
Peer-reviewed publications
Work produced at EPFL
Journal Articles
Published
Record creation date 2011-12-16

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