Influence of Argon and Nitrogen Admixture in HMDSO/O-2 Plasmas onto Powder Formation
In situ Fourier transform infrared spectroscopy was used to study the powder formation of hexamethyldisiloxane/O-2 plasmas. The spectra show that oxygen plays an important role at the beginning of the process. A large amount of oxygen is responsible for intense powder formation. The admixture of inert or non-reactant gases, such as AT or N-2, into the plasma promotes polymerization of the monomer. The formation of the particulates, the evolution of their size, and chemical characteristics give evidence of a multistep growth process. The size, as well as the production rate, undergoes a reduction once the Ar or N-2 amount is increased in the plasma admixture.
Keywords: FTIR spectroscopy ; Hmdso ; Oes ; Pecvd ; powder ; Chemical Vapor-Deposition ; Laser-Light Scattering ; Rf Silane Plasmas ; Infrared-Spectroscopy ; Siox Films ; In-Situ ; Discharge ; Diagnostics ; Dynamics ; Silicon
Record created on 2011-12-16, modified on 2016-08-09