We report on the advances towards the design and fabrication of a system consisting or two 10mm mirrors, one actuated magnetically and the other electrostatically. The system will be used for beam steering. The maximum resonant frequencies and deflection angle of each of the actuators will be reviewed and compared.
Title
Microfrabricated Mirrors For Space Applications
Published in
Moems And Miniaturized Systems X
Series
Proceedings of SPIE, 7930
Pages
79300W
Conference
Conference on MOEMS and Miniaturized Systems X, San Francisco, CA, Jan 24-26, 2011
Date
2011
Publisher
Spie-Int Soc Optical Engineering, Po Box 10, Bellingham, Wa 98227-0010 Usa
ISBN
978-0-8194-8467-3
Record creation date
2011-12-16