Microfrabricated Mirrors For Space Applications
Bayat, Dara; Ataman, Caglar; Guldimann, Benedikt; Lani, Sebastien; Noell, Wilfried; de Rooij, Nico
2011

Abstract

We report on the advances towards the design and fabrication of a system consisting or two 10mm mirrors, one actuated magnetically and the other electrostatically. The system will be used for beam steering. The maximum resonant frequencies and deflection angle of each of the actuators will be reviewed and compared.

Details

Title Microfrabricated Mirrors For Space Applications
Author(s) Bayat, Dara ; Ataman, Caglar ; Guldimann, Benedikt ; Lani, Sebastien ; Noell, Wilfried ; de Rooij, Nico
Published in Moems And Miniaturized Systems X
Series Proceedings of SPIE, 7930
Pages 79300W
Conference Conference on MOEMS and Miniaturized Systems X, San Francisco, CA, Jan 24-26, 2011
Date 2011
Publisher Spie-Int Soc Optical Engineering, Po Box 10, Bellingham, Wa 98227-0010 Usa
ISBN 978-0-8194-8467-3
Keywords
DOI https://doi.org/10.1117/12.875038
Other identifier(s) View record in Web of Science
Laboratories SAMLAB
Record Appears in Scientific production and competences > STI - School of Engineering > STI Archives > SAMLAB - Sensors, Actuators and Microsystems Laboratory
Conference Papers
Work produced at EPFL
Published
Record creation date 2011-12-16

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