Floating-potential self-assembly of singe-walled carbon nanotube field effect transistors by ac-dielectrophoresis

An improved method for self-assembly fabrication of single-walled carbon nanotube (SWCNT) field effect transistors (FETs) is presented, combining the unique design of biased/floating potential electrode geometry and the technique of aligning CNTs by pre-defined trenches in "Sandwich"-like resist layers. Super-aligned SWCNT FETs bridging biased/floating potential electrode pairs with precisely controlled location can be demonstrated. Moreover, SWCNT FETs fabricated by this method exhibit excellent electrical properties, such as I-on/I-off ratio up to 10(5) and sub-threshold slope similar to 130 mV/dec. This novel technique provides a more effective and flexible way to solve the CNT assembly issue. It could also enable the fabrication of future CNT based complementary logic circuit and nano-electrical-mechanical-system (NEMS). (C) 2011 Elsevier B.V. All rights reserved.

Published in:
Microelectronic Engineering, 88, 2463-2465

 Record created 2011-12-16, last modified 2018-03-17

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