Design, simulation, fabrication, packaging, and characterization of a MEMS-based mirror array for femtosecond pulse-shaping in phase and amplitude

We present an in-detail description of the design, simulation, fabrication, and packaging of a linear micromirror array specifically designed for temporal pulse shaping of ultrashort laser pulses. The innovative features of this device include a novel comb-drive actuator allowing both piston and tilt motion for phase- and amplitude-shaping, and an X-shaped laterally reinforced spring preventing lateral snap-in while providing high flexibility for both degrees of freedom. (C) 2011 American Institute of Physics. [doi:10.1063/1.3606440]


Published in:
Review Of Scientific Instruments, 82, 075106
Year:
2011
Publisher:
American Institute of Physics
ISSN:
0034-6748
Keywords:
Laboratories:




 Record created 2011-12-16, last modified 2018-03-17


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