Full-field microimaging with 8 keV X-rays achieves a spatial resolutions better than 20 nm

Fresnel zone plates (450 nm thick Au, 25 nm outermost zone width) used as objective lenses in a full field transmission reached a spatial resolution better than 20 nm and 1.5% efficiency with 8 keV photons. Zernike phase contrast was also realized without compromising the resolution. These are very significant achievements in the rapid progress of high-aspect-ratio zone plate fabrication by combined electron beam lithography and electrodeposition. (C) 2011 Optical Society of America


Published in:
Optics Express, 19, 19919-19924
Year:
2011
Publisher:
Optical Society of America
ISSN:
1094-4087
Keywords:
Laboratories:




 Record created 2011-12-16, last modified 2018-03-18


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