Nanomechanical Membrane-type Surface Stress Sensor (MSS)
2011
Details
Title
Nanomechanical Membrane-type Surface Stress Sensor (MSS)
Author(s)
Yoshikawa, G. ; Akiyama, Terunobu ; Gautsch, Sebastian ; Vettiger, Peter ; Rohrer, H.
Conference
MANA International Symposium 2011 , Tsukuba, Japan, March 2-4, 2011
Date
2011
Laboratories
SAMLAB
Record Appears in
Scientific production and competences > STI - School of Engineering > STI Archives > SAMLAB - Sensors, Actuators and Microsystems Laboratory
Presentations & Talks
Work produced at EPFL
Published
Presentations & Talks
Work produced at EPFL
Published
Record creation date
2011-11-28