Optimization of piezoresistive cantilever sensors towards highly sensitive membrane-type surface stress sensors (MSS)
2011
Details
Title
Optimization of piezoresistive cantilever sensors towards highly sensitive membrane-type surface stress sensors (MSS)
Author(s)
Yoshikawa, G. ; Akiyama, Terunobu ; Gautsch, Sebastian ; Vettiger, Peter ; Rohrer, H.
Conference
The Japan Society of Applied Physics The 58st Spring Meeting, Atsugi, Japan, March, 2011
Date
2011
Laboratories
SAMLAB
Record Appears in
Scientific production and competences > STI - School of Engineering > STI Archives > SAMLAB - Sensors, Actuators and Microsystems Laboratory
Presentations & Talks
Work produced at EPFL
Published
Presentations & Talks
Work produced at EPFL
Published
Record creation date
2011-11-28