A novel technological platform is presented for the fabrication of vertical flaps and gratings of arbitrary shape. The flaps are suspended by torsion beams and actuated electrostatically at voltages as low as 10V. The main application is a high contrast reflective display.
Title
Vertical Flaps of Arbitrary Shape For Reflective MEMS Displays and Optical Modulators
Published in
Proceedings of Optical MEMS & Nanophotonics
Pages
155-156
Conference
Optical MEMS & Nanophotonics, Istanbul, Turkey, August 8-11, 2011
Date
2011
Publisher
Ieee Service Center, 445 Hoes Lane, Po Box 1331, Piscataway, Nj 08855-1331 Usa
Language
English
Record creation date
2011-11-11