30nm Metallic Slot Array for Sensing: Theoretical and Experimental Study
Tan, Qing; Cosentino, Armando; Roussey, Matthieu; Herzig, Hans Peter
2011

Abstract

The simulation, fabrication and characterization of a metallic slot grating on a silicon waveguide (30 nm slot width for a period of 500 nm) are presented [1]. This device is attempting to be a sensor for refractive index variation measurements with theoretically expected sensitivity of 750 nm/RIU (Refractive Index Unit).

Details

Title 30nm Metallic Slot Array for Sensing: Theoretical and Experimental Study
Author(s) Tan, Qing ; Cosentino, Armando ; Roussey, Matthieu ; Herzig, Hans Peter
Published in Omn2011: 16Th International Conference On Optical Mems And Nanophotonics
Pages 27-28
Conference 16th International Conference on Optical MEMS and Nanophotonics, Istanbul, Turkey, August 8-11, 2011
Date 2011
Publisher Ieee Service Center, 445 Hoes Lane, Po Box 1331, Piscataway, Nj 08855-1331 Usa
ISBN 978-1-4577-0336-2
Keywords
Language English
DOI https://doi.org/10.1109/OMEMS.2011.6031099
Other identifier(s) View record in Web of Science
Laboratories OPT
Record Appears in Scientific production and competences > STI - School of Engineering > STI Archives > OPT - Optics and Photonics Technology Laboratory
Conference Papers
Work produced at EPFL
Published
Record creation date 2011-09-27