Planar Integrated Sensors on Waveguides for sensing applications

We investigate the use of a metallic nano-cavity on dielectric waveguides for sensing applications. Nowadays the fabrication of metallic structures featured by challenging dimensions is feasible thanks to the most recent technologies such as E-Beam Lithography (EBL) and lift-off [1]. We propose here to study the simulation, fabrication and characterization of such structures at the telecom wavelength (λ=1.55 μm).


Presented at:
SPP5 the 5th International Conference on Surface Plasmon Photonics 2011, Busan, South Korea, May 15-20, 2011
Year:
2011
Keywords:
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 Record created 2011-09-27, last modified 2018-03-17

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