MEMS Based Piezoelectric Harvesters: From Thick Sheet to Thin Film Epitaxial Piezoelectric Materials
2011
Details
Title
MEMS Based Piezoelectric Harvesters: From Thick Sheet to Thin Film Epitaxial Piezoelectric Materials
Author(s)
Janphuang, P. ; Isarakorn, D. ; Briand, D. ; Gariglio, S. ; Ambri, A. ; Triscone, J.-M. ; Guy, F. ; Reiner, J. W. ; Ahn, C. H. ; de Rooij, N.
Conference
2nd International Workshop on Piezoelectric MEMS, Lausanne, Switzerland, September 6-7,2011
Date
2011
Keywords
Laboratories
SAMLAB
Record Appears in
Scientific production and competences > STI - School of Engineering > STI Archives > SAMLAB - Sensors, Actuators and Microsystems Laboratory
Presentations & Talks
Work produced at EPFL
Published
Presentations & Talks
Work produced at EPFL
Published
Record creation date
2011-09-16