Fabrication of polymeric micro structures by controlled drop on demand inkjet printing

Well controlled spherical microstructures could enable several novel MEMS devices. However, micro machining of spherical shapes has proven to be difficult with conventional planar microfabrication processes [1]. This paper presents a method allowing to fabricate controlled micro spherical structures. Drops of approximately 30 picoliters of polymeric solution were accurately inkjet printed on rounded platforms. The deposited volume is confined by rim of these platforms, thus allowing a fine control of the spherical cap edge angle as well as the volume and the radius of curvature. The process proposed allowed to fabricate large arrays of micro spherical shapes, with a controlled edge angle between 25° and 110°. Several arrays of 30 by 30 micro hemispheres with an edge angle of 90° have been successfully fabricated with a yield above 98%.


Published in:
Proceedings of the 22nd Micromechanics and Microsystems Technology Europe Workshop, A20, 97-100
Presented at:
22nd Micromechanics and Micro systems Europe Workshop, Toensberg, Norway, June 19-22, 2011
Year:
2011
Publisher:
Norway, Department of micro and nano systems technology Vestfold University College, Norway
ISBN:
978-82-7860-224-9
Keywords:
Note:
Obtained the best poster award
Laboratories:


Note: The status of this file is: EPFL only


 Record created 2011-08-28, last modified 2018-03-17

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Proceeding MME 2011 - Loïc Jacot-Descombes - Download fulltextPDF
MME 2011 poster - Download fulltextPDF
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