Growth-mode induced defects in epitaxial SrTiO3 thin films grown on single crystal LaAlO3 by a two-step PLD process
Su, Dong; Yamada, Tomoaki; Gysel, Roman; Tagantsev, Alexander K.; Muralt, Paul; Setter, Nava; Jiang, Nan
2011

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Abstract

We grew epitaxial SrTiO3 (STO) thin films on (001) LaAlO3 substrates via a two-step procedure using pulsed laser deposition and studied them with transmission electron microscopy in plane-view and cross-sectional samples. We found that partial misfit dislocations are the main interfacial defects, whereas planar defects are the main defects in STO films. Our results suggest that a three-dimensional island mode dominates the growth of the STO film.

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Title Growth-mode induced defects in epitaxial SrTiO3 thin films grown on single crystal LaAlO3 by a two-step PLD process
Author(s) Su, Dong ; Yamada, Tomoaki ; Gysel, Roman ; Tagantsev, Alexander K. ; Muralt, Paul ; Setter, Nava ; Jiang, Nan
Published in Journal of Materials Research
Volume 26
Issue 06
Pages 770-774
Date 2011
Publisher Cambridge University Press
ISSN 2044-5326
Keywords
Note National Licences
DOI https://doi.org/10.1557/jmr.2010.82
Other identifier(s) View record in Web of Science
Laboratories LC
Record Appears in Scientific production and competences > STI - School of Engineering > STI Archives > LC - Ceramics Laboratory
Work produced at EPFL
Journal Articles
Published
Record creation date 2011-08-11

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