Theoretical and experimental study of a 30nm metallic slot array

We present the simulation, fabrication, and characterization of a metallic slot grating on a silicon waveguide (30nm slot width for a period of 500nm). According to the simulation, the experimental measured spectrum of the structure exhibits a dip in the near-infrared region. Moreover, the finite-difference time-domain simulation shows that this device can be used as a sensor, due to its high sensitivity to the refractive index variation of the medium above and inside the cavity (η ¼ Δλ=Δn ¼ 750nm=refractive index unit).


Published in:
Journal Of The Optical Society Of America B-Optical Physics, 28, 7, 1711-1715
Year:
2011
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 Record created 2011-07-13, last modified 2018-12-03

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