Drawing with Nanostencils on Flexible Substrates

Nanostencils are used in dynamic mode to pattern on top of flexible substrates. As the stencil is moving during the material evaporation, the obtained structures are the convolution between the stencil trajectory and the apertures’ geometry. Variable-thickness and arbitrary shapes are obtained at 100 mm wafer scale.


Presented at:
The 55th International conference on electron, ion, and photon beam technology and nanofabrication" (EIPBN), Las Vegas, NE, USA, May 31 -June 3, 2011
Year:
2011
Keywords:
Laboratories:


Note: The status of this file is: EPFL only


 Record created 2011-06-27, last modified 2018-09-13

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