000166120 001__ 166120
000166120 005__ 20190917061311.0
000166120 0247_ $$2doi$$a10.5075/epfl-thesis-5098
000166120 02470 $$2urn$$aurn:nbn:ch:bel-epfl-thesis5098-7
000166120 02471 $$2nebis$$a6451957
000166120 037__ $$aTHESIS
000166120 041__ $$aeng
000166120 088__ $$a5098
000166120 245__ $$aCalibration of Ultra-high-precision Robots Operating in an Unsteady Environment
000166120 269__ $$a2011
000166120 260__ $$bEPFL$$c2011$$aLausanne
000166120 300__ $$a174
000166120 336__ $$aTheses
000166120 520__ $$aIn recent years nanotechnology has become an enabling technology for the development and fabrication of new innovative products. The growth of micro- and nano-manufacturing lies in the ability of converting micro- and nano-fabrication techniques into mass-production industrial processes, where small-scale products can be economically manufactured in a short period of time. When dealing with nano-scale objects and industrial processes it is necessary to take into account the physics acting at this level of precision. Phenomena such as friction, heat transfer, and adhesion forces have far more dramatic effects on the deformation of the robot geometry at the nano-scale than at macro- and micro-scales, thus affecting the industrial process that the robot will perform. The development of micro- and nano-fabrication techniques thus requires a thorough understanding of the physics behind nanorobotics. Specifically, to enable sub-micrometer accuracy for ultra-high-precision robots it is necessary to acquire a complete knowledge of how all sources of inaccuracy deform the robots at nano-scale. Furthermore, a way to compensate for such effects to maintain an acceptable level of accuracy has to be found. In this thesis we fulfill these needs by proposing a new calibration procedure specifically designed for industrial nano-systems working in a thermally unstable environment, a method to evaluate and compensate for external forces acting on ultra-high-precision robots and a method to relate the calibration of several robots working together. This is done by measuring how each source of inaccuracy deforms the robot, modeling this effect and compensating it in real-time. To allow this modus operandi, we propose a new calibration procedure summarized in the following six steps: Step 0 A judicious design of the robot that takes into account the calibration problem and the pose measurement, Step 1 Study of the sources of inaccuracy linked to the robot and the industrial process that it will perform, Step 2 Measurement of several end-effector poses, Step 3 Identification of a function that describes the robot geometry and its behavior when subjected to the sources of inaccuracy identified in Step 1, Step 4 Implementation of the model found in Step 3 into the robot controller, Step 5 Validation and potential return to Step 1 or Step 0. The effectiveness of this calibration procedure is proven by testing it on three case studies, examined in order of complexity: A 1 DOF (degree(s)-of-freedom) ultra-high-precision linear axis was calibrated while thermal effects were deforming it. The 3 DOF ultra-high-precision parallel robot Agietron Micro-Nano was calibrated while thermal effects and an external force were acting on it. An ultra-high-precision 2-robot system was calibrated while thermal effects were acting on it. Thus, an exhaustive study on relating the references of the two robots was carried out. For each case we developed an appropriate ultra-high-precision measuring system used to acquire the pose of the robot end-effector. We measured the end-effector position throughout the workspace while the sources of inaccuracy were acting on the robot to map how they affect the robot geometry. We used the Stepwise Regression algorithm to identify a mathematical model able to describe the geometric features of the robot while all the sources of inaccuracy are acting on it. The model is then implemented in the robot controller and a validation of the calibration accuracy is performed. For every ultra-high-precision robot considered in this work we reached an absolute accuracy of ±100 nm. We finished the coverage of this thesis by analyzing the nano-indentation process as a calibration confirmation tool and as an industrial process. Furthermore, we describe how to use a multiple ultra-high-precision concurrent system of robots. This work was financed by the FNS (Swiss National Foundation for research).
000166120 6531_ $$aRobotics
000166120 6531_ $$aNano-Robotics
000166120 6531_ $$aCalibration
000166120 6531_ $$aHigh-precision
000166120 6531_ $$aThermal Drift
000166120 6531_ $$aExternal Forces
000166120 6531_ $$aStepwise Regression
000166120 6531_ $$aIndentation
000166120 6531_ $$aRobotique
000166120 6531_ $$aNano-robotique
000166120 6531_ $$aEtalonnage
000166120 6531_ $$aHaute-précision
000166120 6531_ $$aDérive thermique
000166120 6531_ $$aForces externes
000166120 6531_ $$aStepwise regression
000166120 6531_ $$aIndentation
000166120 700__ $$0242138$$g166088$$aLubrano, Emanuele
000166120 720_2 $$aClavel, Reymond$$edir.$$g104789$$0242132
000166120 8564_ $$zTexte intégral / Full text$$yTexte intégral / Full text$$uhttps://infoscience.epfl.ch/record/166120/files/EPFL_TH5098.pdf$$s8344473
000166120 909C0 $$0252016$$pLSRO
000166120 909CO $$pSTI$$pthesis$$pthesis-bn2018$$pDOI$$ooai:infoscience.tind.io:166120$$qDOI2$$qGLOBAL_SET
000166120 918__ $$dEDPR$$cIMT$$aSTI
000166120 919__ $$aLSRO2
000166120 920__ $$b2011
000166120 970__ $$a5098/THESES
000166120 973__ $$sPUBLISHED$$aEPFL
000166120 980__ $$aTHESIS