000165824 001__ 165824
000165824 005__ 20190117220046.0
000165824 037__ $$aCONF
000165824 245__ $$aGOLD MEMBRANES WITH LARGE ARRAYS OF SUB-µm HOLES FABRICATED BY WAFER-SCALE NANOSPHERE LITHOGRAPHY
000165824 269__ $$a2011
000165824 260__ $$c2011
000165824 336__ $$aConference Papers
000165824 520__ $$aGold membranes with large arrays of sub-µm holes were fabricated and optically characterized. The fabrication is a combination of a bottom-up, self-assembly based patterning technique, Nanosphere Lithography (NSL), and standard microfabrication. This was achieved by 1) up-scaling of the deposition of close-packed bead monolayers to 4’’ wafer substrates, 2) controlled bead size reduction, 3) etching of high aspect-ratio Si pillar arrays, 4) using the pillar arrays as a lift-off template, and 5) releasing the membranes by dry-etching. In this way, millimeter-size, 200 nm thick gold membranes with dense, short-range ordered hole arrays were fabricated. The array periodicity was either 428 nm or 535 nm, depending on the initial bead size. The hole diameter was tuned in the range of 150 nm to 250 nm. Optical transmission spectroscopy showed surface plasmon mediated extraordinary optical transmission (EOT) with an enhancement factor greater than two.
000165824 6531_ $$ananosphere lithography
000165824 6531_ $$agold membrane
000165824 6531_ $$ahole arrays
000165824 6531_ $$asub-wavelength holes
000165824 6531_ $$asurface plasmons
000165824 6531_ $$aextraordinary optical transmission
000165824 700__ $$aKlein, Mona Julia Katharina
000165824 700__ $$aEckert, Rolf
000165824 700__ $$aGuillaumée, Mickaël
000165824 700__ $$aDunbar, L. Andrea
000165824 700__ $$aHeinzelmann, Harry
000165824 700__ $$0240120$$g145781$$aBrugger, Jürgen
000165824 700__ $$aPugin, Raphaël
000165824 7112_ $$dJune 5-9, 2011$$cBeijing, China$$aThe 16th International Conference on Solid-State Sensors, Actuators and Microsystems
000165824 909C0 $$xU10321$$0252040$$pLMIS1
000165824 909CO $$pconf$$pSTI$$ooai:infoscience.tind.io:165824
000165824 917Z8 $$x178091
000165824 917Z8 $$x229906
000165824 937__ $$aEPFL-CONF-165824
000165824 973__ $$rREVIEWED$$sPUBLISHED$$aEPFL
000165824 980__ $$aCONF