Interferometer coordinate measurement system for use in measurement and machining tools has partially reflecting boundary surfaces within its measurement head with a separation shorter than the coherence length

The invention relates to an interferometer system (41), especially for use in a co-ordinate measuring system. Said interferometer system comprises, disposed in an illumination beam path, a pair of spaced-apart boundary surfaces (52, 53). A boundary surface (53) facing an object (9) is arranged in a detection beam path, a detector (61) being additionally disposed in said detection beam path. The invention also relates to an interferometer system, especially one of the above-described type, which is provided with a speed indicating system for detecting a relative speed between the test head and the object. A frequency filter of the interferometer system is adjusted depending on the relative speed.

Other identifiers:
EPO Family ID: 32519247

 Record created 2011-04-15, last modified 2018-09-13

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