Scanning optical near field microscope for use with different contrast methods, including phase contrast microscopy, has an improved photo-detector design that improves resolution and imaging of the smallest structures
Optical near field microscope for use with different, including differential contrast, methods. Microscope has a near field illuminating light source probe (3) and a photo-detector for detection of light from the object (6). Said detector has electronics for processing the detected signals to yield details of object structures. The photo-detector (9) is a structured photo-receiver and outputs photo-receiver signals to the evaluation electronics. The invention also relates to a corresponding method.
- Search for this record at the European Patent Office
Record created on 2011-04-15, modified on 2016-08-09