Focused Ion Beam: A Versatile Technique for the Fabrication of Nano-Devices
2009
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Title
Focused Ion Beam: A Versatile Technique for the Fabrication of Nano-Devices
Author(s)
Santschi, Christian ; Przybylska, Joanna ; Guillaumee, Mickael ; Vazquez-Mena, Oscar ; Brugger, Juergen ; Martin, Olivier J. F.
Published in
Praktische Metallographie-Practical Metallography
Volume
46
Issue
3
Pages
154-156
Date
2009
Other identifier(s)
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Record Appears in
Scientific production and competences > STI - School of Engineering > IEM - Institut d'Electricité et de Microtechnique > NAM - Nanophotonics and Metrology Laboratory
Scientific production and competences > STI - School of Engineering > IEM - Institut d'Electricité et de Microtechnique > LMIS1 - Microsystems Laboratory 1
Peer-reviewed publications
Work produced at EPFL
Journal Articles
Published
Scientific production and competences > STI - School of Engineering > IEM - Institut d'Electricité et de Microtechnique > LMIS1 - Microsystems Laboratory 1
Peer-reviewed publications
Work produced at EPFL
Journal Articles
Published
Record creation date
2011-04-11