RF breakdown in low pressure gases between small (millimetric) gap parallel plate electrodes with surface structures


Published in:
Proceedings of the 7th ICRP and 63rd GEC conference, TF1-003
Presented at:
7th ICRP and 63rd GEC, Paris, France, October 4-8, 2010
Year:
2010
Laboratories:
SPC
CRPP




 Record created 2011-03-09, last modified 2018-01-28


Rate this document:

Rate this document:
1
2
3
 
(Not yet reviewed)