Fluxgate-type magnetic microsensors for wide linear measuring range

In this paper, we present a microfabricated fluxgate sensor for wide linear measuring range applications. The sensor consists of an electroplated copper excitation rod surrounded by an electroplated Permalloy core layer, and has planar pick-up coils for signal detection. Fabricated sensors are tested in orthogonal and parallel operation modes. The effects of operation modes and excitation conditions are compared. A linear operating range of ±900 μT is proved in the orthogonal mode, whereas the same sensor has much lower linear range in the parallel mode. The use of the sensor in a contactless current measurement application is also presented.


Presented at:
Sensors and Applications Symposium (SAS07), San Diego CA,USA, February 6-8th, 2007
Year:
2007
Laboratories:


Note: The status of this file is: EPFL only


 Record created 2011-02-10, last modified 2018-03-17

Publisher's version:
Download fulltext
PDF

Rate this document:

Rate this document:
1
2
3
 
(Not yet reviewed)