Fluxgate-type magnetic microsensors for wide linear measuring range

In this paper, we present a microfabricated fluxgate sensor for wide linear measuring range applications. The sensor consists of an electroplated copper excitation rod surrounded by an electroplated Permalloy core layer, and has planar pick-up coils for signal detection. Fabricated sensors are tested in orthogonal and parallel operation modes. The effects of operation modes and excitation conditions are compared. A linear operating range of ±900 μT is proved in the orthogonal mode, whereas the same sensor has much lower linear range in the parallel mode. The use of the sensor in a contactless current measurement application is also presented.

Presented at:
Sensors and Applications Symposium (SAS07), San Diego CA,USA, February 6-8th, 2007

Note: The status of this file is: EPFL only

 Record created 2011-02-10, last modified 2018-09-13

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