Formation of platinum interconnection lines and periodic structures
Laser-induced CVD has been used to produce Pt lines on pyrex glass substrates by means of platinum bis(hexafluoroacetylacetonate) as precursor. The effect that writing speed has on the line geometry and resistivity was studied, as well as the influence of writing speed, precursor vapor pressure, and laser power on periodic structure formation. The results are discussed in terms of laser beam residence time and radiation-induced temp. increase. It is possible to obtain lines with a resistivity very close to that of pure Pt under optimum exptl. conditions.
Keywords: 7440-06-4P (Platinum) Role: PNU (Preparation ; unclassified) ; PREP (Preparation) (interconnection lines ; formation of) ; 65353-51-7 Role: USES (Uses) (platinum lines from ; by laser-induced CVD deposition) ; platinum interconnection line formation ; hexafluoroacetylacetonate platinum interconnection line CVD
Copyright 2003 ACS
Esc. Tec. Super. Ing. Ind.,Univ. Vigo,Vigo,Spain. FIELD URL:
written in English.
Electric conductors (interconnections, platinum lines, formation of)
Record created on 2011-02-01, modified on 2016-08-09