Formation of platinum interconnection lines and periodic structures

Laser-induced CVD has been used to produce Pt lines on pyrex glass substrates by means of platinum bis(hexafluoroacetylacetonate) as precursor. The effect that writing speed has on the line geometry and resistivity was studied, as well as the influence of writing speed, precursor vapor pressure, and laser power on periodic structure formation. The results are discussed in terms of laser beam residence time and radiation-induced temp. increase. It is possible to obtain lines with a resistivity very close to that of pure Pt under optimum exptl. conditions.


Published in:
Japanese Journal of Applied Physics, 32, 1312
Year:
1993
Keywords:
Note:
Copyright 2003 ACS
CAPLUS
AN 1993:202868
CAN 118:202868
76-2
Electric Phenomena
Esc. Tec. Super. Ing. Ind.,Univ. Vigo,Vigo,Spain. FIELD URL:
Journal
JAPNDE
written in English.
Electric conductors (interconnections, platinum lines, formation of)
Laboratories:




 Record created 2011-02-01, last modified 2018-09-13


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