Infoscience

Journal article

Formation of platinum interconnection lines and periodic structures

Laser-induced CVD has been used to produce Pt lines on pyrex glass substrates by means of platinum bis(hexafluoroacetylacetonate) as precursor. The effect that writing speed has on the line geometry and resistivity was studied, as well as the influence of writing speed, precursor vapor pressure, and laser power on periodic structure formation. The results are discussed in terms of laser beam residence time and radiation-induced temp. increase. It is possible to obtain lines with a resistivity very close to that of pure Pt under optimum exptl. conditions.

Fulltext

Related material