Platinum spots on silicon deposited by photon induced chemical vapor deposition

Laser induced photolytic and pyrolytic deposition spots on silicon are studied for different laser powers, partial pressure and deposition time. In the photolytic case at low powers, the reaction takes place in the adsorbed phase on the surface, whereas at higher powers it is a predominantly gas phase process. Schottky diodes have been tested to demonstrate the good quality of platinum deposits.


Published in:
AIP Conference Proceedings, 439, 191
Year:
1989
Keywords:
Note:
Copyright 2003 ACS
CAPLUS
AN 1989:645482
CAN 111:245482
76-3
Electric Phenomena
66, 74
Appl. Phys. Dep.,Univ. Santiago,Vigo,Spain. FIELD URL:
Journal
APCPCS
written in English.
Diodes (Schottky, platinum on silicon, photolytic and pyrolytic chem.-vapor deposition in fabrication of)
Laboratories:




 Record created 2011-02-01, last modified 2018-01-28


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