Platinum spots on silicon deposited by photon induced chemical vapor deposition
Laser induced photolytic and pyrolytic deposition spots on silicon are studied for different laser powers, partial pressure and deposition time. In the photolytic case at low powers, the reaction takes place in the adsorbed phase on the surface, whereas at higher powers it is a predominantly gas phase process. Schottky diodes have been tested to demonstrate the good quality of platinum deposits.
Keywords: 7440-06-4 (Platinum) Role: PEP (Physical ; engineering or chemical process) ; PROC (Process) (photolytic and pyrolytic deposition of ; on silicon ; chem.-vapor); 65353-51-7 (Platinum bis-hexafluoroacetyl-acetonate) Role: USES (Uses) (platinum chem. vapor de ; Schottky diode laser processing quality; photolytic platinum deposition CVD; pyrolytic platinum deposition CVD; silicon platinum deposition photolytic pyrolytic
Copyright 2003 ACS
Appl. Phys. Dep.,Univ. Santiago,Vigo,Spain. FIELD URL:
written in English.
Diodes (Schottky, platinum on silicon, photolytic and pyrolytic chem.-vapor deposition in fabrication of)
Record created on 2011-02-01, modified on 2016-08-09