Platinum spots on silicon deposited by photon induced chemical vapor deposition
1989
Abstract
Laser induced photolytic and pyrolytic deposition spots on silicon are studied for different laser powers, partial pressure and deposition time. In the photolytic case at low powers, the reaction takes place in the adsorbed phase on the surface, whereas at higher powers it is a predominantly gas phase process. Schottky diodes have been tested to demonstrate the good quality of platinum deposits.
Details
Title
Platinum spots on silicon deposited by photon induced chemical vapor deposition
Author(s)
Garrido, C. ; Leon, B. ; Perez-Amor, M. ; Braichotte, D. ; Van den Bergh, H.
Published in
AIP Conference Proceedings
Volume
191
Issue
1
Pages
439-441
Date
1989
Keywords
7440-06-4 (Platinum) Role: PEP (Physical; engineering or chemical process); PROC (Process) (photolytic and pyrolytic deposition of; on silicon; chem.-vapor); 65353-51-7 (Platinum bis-hexafluoroacetyl-acetonate) Role: USES (Uses) (platinum chem. vapor de; Schottky diode laser processing quality; photolytic platinum deposition CVD; pyrolytic platinum deposition CVD; silicon platinum deposition photolytic pyrolytic
Note
Copyright 2003 ACS
CAPLUS
AN 1989:645482
CAN 111:245482
76-3
Electric Phenomena
66, 74
Appl. Phys. Dep.,Univ. Santiago,Vigo,Spain. FIELD URL:
Journal
APCPCS
written in English.
Diodes (Schottky, platinum on silicon, photolytic and pyrolytic chem.-vapor deposition in fabrication of)
CAPLUS
AN 1989:645482
CAN 111:245482
76-3
Electric Phenomena
66, 74
Appl. Phys. Dep.,Univ. Santiago,Vigo,Spain. FIELD URL:
Journal
APCPCS
written in English.
Diodes (Schottky, platinum on silicon, photolytic and pyrolytic chem.-vapor deposition in fabrication of)
Laboratories
LPAS
Record Appears in
Scientific production and competences > ENAC - School of Architecture, Civil and Environmental Engineering > ENAC Archives > LPAS - Air and Soil Pollution Laboratory
Peer-reviewed publications
Work produced at EPFL
Journal Articles
Published
Peer-reviewed publications
Work produced at EPFL
Journal Articles
Published
Record creation date
2011-02-01