Journal article

Platinum spots on silicon deposited by photon induced chemical vapor deposition

Laser induced photolytic and pyrolytic deposition spots on silicon are studied for different laser powers, partial pressure and deposition time. In the photolytic case at low powers, the reaction takes place in the adsorbed phase on the surface, whereas at higher powers it is a predominantly gas phase process. Schottky diodes have been tested to demonstrate the good quality of platinum deposits.


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