The laser-induced pyrolytic deposition of Pt spots on glass was studied for different laser powers, beam diams., and irradn. time. Laser powers up to 500 mW give deposition rates of typically 0.5 mm/s. Temp. calcns. as a function of time allows one to study process kinetics according to the thickness and diam. of the spots. Resistivity measurements of Pt lines give comparable values to those of bulk material.
Title
Laser Induced Chemical Vapour Deposition Of Platinum Spots On Glass
Published in
Laser Assisted Processing
Series
SPIE Proceedings, 1022
Volume
1022
Pages
81
Conference
1988 International Congress on Optical Science and Engineering, Hamburg, Germany, 1988
Date
1989
Note
CAPLUS AN 1989:506611 CAN 111:106611 76-2 Electric Phenomena Appl. Phys. Dep.,Univ. Santiago,Vigo,Spain. FIELD URL: Journal PSISDG written in English.
Record creation date
2011-02-01