Laser induced chemical vapor deposition of platinum spots on glass

The laser-induced pyrolytic deposition of Pt spots on glass was studied for different laser powers, beam diams., and irradn. time. Laser powers up to 500 mW give deposition rates of typically 0.5 mm/s. Temp. calcns. as a function of time allows one to study process kinetics according to the thickness and diam. of the spots. Resistivity measurements of Pt lines give comparable values to those of bulk material.


Published in:
SPIE Proceedings, 1022
Year:
1989
Keywords:
Note:
Copyright 2003 ACS
CAPLUS
AN 1989:506611
CAN 111:106611
76-2
Electric Phenomena
Appl. Phys. Dep.,Univ. Santiago,Vigo,Spain. FIELD URL:
Journal
PSISDG
written in English.
Laboratories:




 Record created 2011-02-01, last modified 2018-12-03


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