Laser induced chemical vapor deposition of platinum spots on glass
The laser-induced pyrolytic deposition of Pt spots on glass was studied for different laser powers, beam diams., and irradn. time. Laser powers up to 500 mW give deposition rates of typically 0.5 mm/s. Temp. calcns. as a function of time allows one to study process kinetics according to the thickness and diam. of the spots. Resistivity measurements of Pt lines give comparable values to those of bulk material.
Keywords: 65353-51-7 Role: USES (Uses) (laser-induced chem. vapor deposition of platinum spots from ; on glass); 7440-06-4 (Platinum) Role: PRP (Properties) (laser-induced chem. vapor deposition of spots of ; on glass) ; laser deposition platinum spot
Copyright 2003 ACS
Appl. Phys. Dep.,Univ. Santiago,Vigo,Spain. FIELD URL:
written in English.
Record created on 2011-02-01, modified on 2016-08-09