Searching for optimum conditions in the laser writing of small ohmic contacts

Microscopic ohmic contacts are made by laser chem. vapor deposition of platinum on a Pyrex substrate. The elec. cond. of the deposited metal stripes is measured as a function of the laser power, the writing speed, and the organometallic vapor pressure. The latter appears to be the key parameter for producing contacts with low resistance at high writing speeds. Even on these transparent substrates there is no apparent advantage in using light at 350 nm, where photolysis may in principle play a significant role, over using visible light where photolysis is not effective.


Published in:
Applied Physics A, 46, 4, 285-290
Year:
1988
Keywords:
Note:
Copyright 2003 ACS
CAPLUS
AN 1988:602522
CAN 109:202522
76-2
Electric Phenomena
74
Lab. Chim. Tech.,Ec. Polytech. Fed. Lausanne,Lausanne,Switz. FIELD URL:
Journal
APSFDB
written in English.
Photolysis (of bis(hexafluoroacetoacetonate) platinum, for deposition of platinum contacts); Electric resistance (of platinum ohmic contacts formed fluoroacetoacetonate platinum); Electric contacts (platinum, photolysis of platinum hexafluoroacetoacetonate complex in fabrication of)
Laboratories:




 Record created 2011-02-01, last modified 2018-01-28


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