Searching for optimum conditions in the laser writing of small ohmic contacts
Microscopic ohmic contacts are made by laser chem. vapor deposition of platinum on a Pyrex substrate. The elec. cond. of the deposited metal stripes is measured as a function of the laser power, the writing speed, and the organometallic vapor pressure. The latter appears to be the key parameter for producing contacts with low resistance at high writing speeds. Even on these transparent substrates there is no apparent advantage in using light at 350 nm, where photolysis may in principle play a significant role, over using visible light where photolysis is not effective.
Keywords: 7440-06-4 (Platinum) Role: PRP (Properties) (ohmic contacts ; deposited by photolysis of platinum hexafluoroacetoacetonate complex) ; 65353-51-7 Role: RCT (Reactant) ; RACT (Reactant or reagent) (photolysis of ; for platinum ohmic contact deposition) ; platinum ohmic contact CVD ; fluoroacetylacetonate platinum CVD ohmic contact ; photolysis platinum acetylacetonate contact CVD
Copyright 2003 ACS
Lab. Chim. Tech.,Ec. Polytech. Fed. Lausanne,Lausanne,Switz. FIELD URL:
written in English.
Photolysis (of bis(hexafluoroacetoacetonate) platinum, for deposition of platinum contacts); Electric resistance (of platinum ohmic contacts formed fluoroacetoacetonate platinum); Electric contacts (platinum, photolysis of platinum hexafluoroacetoacetonate complex in fabrication of)
Record created on 2011-02-01, modified on 2016-08-09