Growth rates and electrical conductivity of microscopic ohmic contacts fabricated by laser chemical vapor deposition of platinum
Braichotte, D.; Van den Bergh, H.
1987

Abstract

The laser chem. vapor deposition of platinum from its bishexafluoroacetylacetonate deriv. is studied with a cw Ar ion laser at 458 and 514 nm. The height, the width, as well as the elec. cond. of the deposited stripes are reported as a function of the vapor pressure of the metalorg. precursor, the laser intensity, and the writing speed.

Details

Title Growth rates and electrical conductivity of microscopic ohmic contacts fabricated by laser chemical vapor deposition of platinum
Author(s) Braichotte, D. ; Van den Bergh, H.
Published in Applied Physics A
Volume 44
Issue 4
Pages 353-359
Date 1987
Keywords
Note Copyright 2003 ACS
CAPLUS
AN 1988:141344
CAN 108:141344
76-2
Electric Phenomena
74
Lab. Chim. Tech.,Ec. Polytech. Fed. Lausanne,Lausanne,Switz. FIELD URL:
Journal
APSFDB
written in English.
Photolysis (of platinum bis(hexafluoroacetylacetonate) complex, in chem. vapor deposition of platinum contacts); Electric contacts (platinum, by laser photolysis of hexafluoroacetylacetonate complex)
DOI https://doi.org/10.1007/BF00624603
Laboratories LPAS
Record Appears in Scientific production and competences > ENAC - School of Architecture, Civil and Environmental Engineering > ENAC Archives > LPAS - Air and Soil Pollution Laboratory
Peer-reviewed publications
Work produced at EPFL
Journal Articles
Published
Record creation date 2011-02-01

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